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Solution Deposition of Transparent Conductive Oxide Thin Films
Technology Description This technology is an aqueous solution deposition process for making high quality thin films of tin oxide, tin antimony oxide, and doped compositions of both. Films made by these methods are extremely smooth, highly transparent, and can be made at variable thicknesses from several nanometers up to a micron. The electrical and...
Published: 3/19/2024
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Inventor(s):
Cory Perkins
,
Douglas Keszler
Keywords(s):
solution deposition
,
thin film
,
Transparent Conductive Oxides
Category(s):
Chemical
,
Device
,
Engineering
,
Materials Science
,
Nanoscience & Microtechnologies
,
Physical Science
,
Sustainability & Cleantechnologies
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