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Method of Producing Nanopatterns
Technology Description Focused ion-beam (FIB) milling is a known technique for fabricating small features in substrates. This technology employs protective metal layer to dramatically improve the fidelity and reproducibility of FIB. Called metal-assisted FIB, or MAFIB, the method employs a sacrificial layer of metal while the ion beam mills the sub...
Published: 4/10/2017   |   Inventor(s): Akash Kannegulla, Li-Jing Cheng
Keywords(s): Ion beam milling, Lithography, Nanofabrication, Nanoimprinting, Nanotechnology, Photonic devices
Category(s): Engineering, Materials Science, Nanoscience & Microtechnologies, Physical Science
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